ULVAC, Inc.

ULVAC KYUSHU CORPORATION

ULVAC TOHOKU, Inc.

ULVAC COATING CORPORATION

ULVAC KIKO, Inc.

ULVAC-PHI, Inc.

ULVAC CRYOGENICS INCORPORATED

ULVAC TECHNO, Ltd.

ULVAC EQUIPMENT SALES, Inc.

TIGOLD CORPORATION

NISSIN SEIGYO Co., LTD.

ULVAC Human Relations, Ltd.

FINE SURFACE TECHNOLOGY CO., LTD.

ULVAC (CHINA) HOLDING CO., LTD.

ULVAC（Shanghai）Trading Co., Ltd.

ULVAC VACUUM EQUIPMENT (SHANGHAI) CO., LTD

ULVAC NINGBO CO., LTD.

ULVAC (SUZHOU) CO., LTD.

ULVAC Research Center SUZHOU Co., Ltd.

ULVAC Orient (Chengdu) Co., Ltd.

ULVAC CRYOGENICS (NINGBO) INCORPORATED

ULVAC Automation Technology (Shanghai) Corporation

ULVAC (Shenyang) Co., Ltd

ULVAC Materials (Suzhou) Co., Ltd.

ULVAC Tianma Electric (Jingjiang) Co., Ltd.

ULVAC Coating Technology (HEFEI) Co.,Ltd.

ULVAC KOREA, Ltd.

Ulvac Korea Precision, Ltd.

Pure Surface Technology, Ltd.

ULVAC CRYOGENICS KOREA INCORPORATED

UF TECH, Ltd.

ULVAC Materials Korea, Ltd.

ULVAC TAIWAN INC.

ULTRA CLEAN PRECISION TECHNOLOGIES CORP.

ULVAC SOFTWARE CREATIVE TECHNOLOGY, CO., LTD.

ULCOAT TAIWAN, Inc.

ULVAC Materials Taiwan, Inc.

ULVAC AUTOMATION TAIWAN Inc.

ULVAC SINGAPORE PTE LTD

ULVAC (THAILAND) LTD.

ULVAC MALAYSIA SDN. BHD.

ULVAC Technologies, Inc.

Physical Electronics USA, Inc.

ULVAC GmbH